A Practical OEM Checklist for Specifying a Mica Heating Plate
https://thermal-innovation-hub.almoheet-travel.com/polyimide-heater-applications-in-electronics-and-semiconductor-equipment
In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry